- 와이어 본딩용 초음파 공구혼 설계에 관한 연구
- ㆍ 저자명
- 이봉구,오명석,마정범,Lee. Bong-Gu,Oh. Myung-Seok,Ma. Jeong-Beom
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2013년|22권 4호|pp.717-722 (6 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, we investigated the design of a wire wedge bonding ultrasonic tool horn using finite element method (FEM) simulations. The proposed method is based on an initial design estimate obtained by FEM analysis. An ultrasonic excitation causes various vibrations of a transducer horn and capillary. A simulated ultrasonic transducer horn and resonator are then built and characterized experimentally using a laser interferometer and electrical impedance analyzer. The vibration characteristics and resonance frequencies close to the exciting frequency are identified using ANSYS. FEM analysis is developed to predict the resonance frequency of the ultrasonic horn and use it in the optimal design of an ultrasonic horn mode shape.