- 515 nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최적 에너지밀도에 대한 이론적 분석
- ㆍ 저자명
- 신동식,조용권,손현기,Shin. Dongsig,Cho. Yongkwon,Sohn. Hyonkee
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2013년|30권 10호|pp.1009-1015 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ultra-short laser pulses are effective, when high requirements concerning accuracy, surface roughness and heat affected zone are demanded for surface structuring. In particular, picosecond laser systems that are suited to be operated in industrial environments are of great interest for many practical applications. This paper focused on inducing optimum process parameters for higher volume ablation rate by analyzing a relationship between crater diameter and optical spot size. In detail, the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration 8 ps and wavelength of 515 nm was discussed. The experimental results showed that wavelength of 515 nm resulted in less threshold fluence ($0.075J/cm^2$) on copper than IR wavelength ($0.3J/cm^2$). As a result, it was possible that optimum fluence for higher volume ablation rate was achieved with $0.28J/cm^2$.