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Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications
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  • Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications
  • Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications
저자명
Bang. Dong-Hyun,Park. Jae-Yeong
간행물명
Journal of electrical engineering & technology
권/호정보
2013년|8권 6호|pp.1320-1327 (8 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In this paper, two different electromagnetic energy harvesters using bulk micromachined silicon spiral springs and Polydimethylsiloxane (PDMS) packaging technique have been fabricated, characterized, and compared to generate electrical energy from ultra-low ambient vibrations under 0.3g. The proposed energy harvesters were comprised of a highly miniaturized Neodymium Iron Boron (NdFeB) magnet, silicon spiral spring, multi-turned copper coil, and PDMS housing in order to improve the electrical output powers and reduce their sizes/volumes. When an external vibration moves directly the magnet mounted as a seismic mass at the center of the spiral spring, the mechanical energy of the moving mass is transformed to electrical energy through the 183 turns of solenoid copper coils. The silicon spiral springs were applied to generate high electrical output power by maximizing the deflection of the movable mass at the low level vibrations. The fabricated energy harvesters using these two different spiral springs exhibited the resonant frequencies of 36Hz and 63Hz and the optimal load resistances of $99{Omega}$ and $55{Omega}$, respectively. In particular, the energy harvester using the spiral spring with two links exhibited much better linearity characteristics than the one with four links. It generated $29.02{mu}W$ of output power and 107.3mV of load voltage at the vibration acceleration of 0.3g. It also exhibited power density and normalized power density of $48.37{mu}W{cdot}cm-3$ and $537.41{mu}W{cdot}cm-3{cdot}g-2$, respectively. The total volume of the fabricated energy harvesters was $1cm{ imes}1cm{ imes}0.6cm$ (height).