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Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
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  • Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
  • Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
저자명
Moon. Seung Eon,Choi. Nak-Jin,Lee. Hyung-Kun,Lee. Jaewoo,Yang. Woo Seok
간행물명
ETRI journal
권/호정보
2013년|35권 4호|pp.617-624 (8 pages)
발행정보
한국전자통신연구원
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.