- 실리콘 웨이퍼를 이용한 이방성의 젖음성을 가지는 초소유성 표면 제작
- ㆍ 저자명
- 이동기,이은행,조영학,Lee. Dong-Ki,Lee. Eun-Haeng,Cho. Younghak
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2014년|23권 6호|pp.533-538 (6 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We fabricated grooved mushroom structures with anisotropic wettability on silicon substrates using basic MEMS processes. The geometry of these grooved mushroom structures could be changed by controlling the additional IPA solution during Si etching by TMAH solution. To understand anisotropic wettability, contact angles (CAs) of hexadecane droplets were measured in the orthogonal and parallel directions to grooved lines. The CA measurement results displayed anisotropic wetting on the grooved mushroom structures. However, specimens with $80{mu}m$ distance between top layers displayed isotropic and superoleophobic wetting. This study demonstrates that the thickness of the top layer is more critical than the width or height of the ridge when determining the wettability of organic solvent. Despite the wide distance between top layers ($80{mu}m$), the specimen with a thin top layer (100 nm) showed highly anisotropic wetting and low CA due to the pinning of droplets at the edge of the top layer.