- 박막 절단용 PZT 구동 미세깊이 조절 장치의 특성
- ㆍ 저자명
- 류상오,김화영,안중환,Ryu. Sang-Oh,Kim. Hwa-Young,Ahn. Jung-Hwan
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2014년|23권 6호|pp.630-635 (6 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.