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Fabrication and Characterization of Optically Encoded Porous Silicon Smart Particles
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  • Fabrication and Characterization of Optically Encoded Porous Silicon Smart Particles
  • Fabrication and Characterization of Optically Encoded Porous Silicon Smart Particles
저자명
Sohn. Honglae
간행물명
Journal of the Chosun Natural Science
권/호정보
2014년|7권 4호|pp.221-226 (6 pages)
발행정보
조선대학교 기초과학연구원
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Optically encoded porous silicon smart particles were successfully fabricated from the free-standing porous silicon thin films using ultrasono-method. DBR PSi was prepared by an electrochemical etch of heavily doped $p^{{+}{+}}$-type silicon wafer. DBR PSi was prepared by using a periodic pseudo-square wave current. The surface-modified DBR PSi was prepared by either thermal oxidation or thermal hydrosilylation. Free-standing DBR PSi films were generated by lift-off from the silicon wafer substrate using an electropolishing current. Free-standing DBR PSi films were ultrasonicated to create DBR-structured porous smart particles. Optical characteristics of porous smart particles were measured by FT-IR spectroscopy. The surface morphology of porous smart particles was determined by FE-SEM.