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Unambiguous 3D Surface Measurement Method for a Micro-Fresnel Lens-Shaped Lenticular Lens Based on a Transmissive Interferometer
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  • Unambiguous 3D Surface Measurement Method for a Micro-Fresnel Lens-Shaped Lenticular Lens Based on a Transmissive Interferometer
  • Unambiguous 3D Surface Measurement Method for a Micro-Fresnel Lens-Shaped Lenticular Lens Based on a Transmissive Interferometer
저자명
Yoon. Do-Young,Kim. Tai-Wook,Kim. Minsu,Pahk. Heui-Jae
간행물명
Journal of the Optical Society of Korea
권/호정보
2014년|18권 1호|pp.37-44 (8 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The use of a laser interferometer as a metrological tool in micro-optics measurement is demonstrated. A transmissive interferometer is effective in measuring an optical specimen having a high angle slope. A configuration that consists of an optical resolution of 0.62 micron is adapted to measure a specimen, which is a micro-Fresnel lens-shaped lenticular lens. The measurement result shows a good repeatability at each fraction of facets, however, a reconstruction of the lens shape profile is disturbed by a known problem of $2{pi}$-ambiguity. To solve this $2{pi}$-ambiguity problem, we propose a two-step phase unwrapping method. In the first step, an unwrapped phase map is obtained by using a conventional unwrapping method. Then, a proposed unwrapping method based on the shape modeling is applied to correct the wrongly unwrapped phase. A measured height of each facet is compared with a profile result measured by AFM.