- 펄스레이저 공정으로 제조한 Sb가 도핑된 SnO2 박막의 전기적 및 광학적 특성
- ㆍ 저자명
- 장기선,이정우,김중원,유상임,Jang. Ki-Sun,Lee. Jung-Woo,Kim. Joongwon,Yoo. Sang-Im
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2014년|51권 1호|pp.43-50 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We fabricated undoped and Sb-doped $SnO_2$ thin films on glass substrates by a pulsed laser deposition (PLD) process. Undoped and 2 - 8 wt% $Sb_2O_3$-doped $SnO_2$ targets with a high density level of ~90% were prepared by the spark plasma sintering (SPS) process. Initially, the effects of the deposition temperature on undoped $SnO_2$ thin films were investigated in the region of $100-600^{circ}C$. While the undoped $SnO_2$ film exhibited the lowest resistivity of $1.20{ imes}10^{-2}{Omega}{cdot}cm$ at $200^{circ}C$ due to the highest carrier concentration generated by the oxygen vacancies, 2 wt% Sb-doped $SnO_2$ film exhibited the lowest resistivity value of $5.43{ imes}10^{-3}{Omega}{cdot}cm$, the highest average transmittance of 85.8%, and the highest figure of merit of 1202 ${Omega}^{-1}{cdot}cm^{-1}$ at $400^{circ}C$ among all of the doped films. These results imply that 2 wt% $Sb_2O_3$ is an optimum doping content close to the solubility limit of $Sb^{5+}$ substitution for the $Sb^{4+}$ sites of $SnO_2$.