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Capacitive Readout Circuit for Tri-axes Microaccelerometer with Sub-fF Offset Calibration
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  • Capacitive Readout Circuit for Tri-axes Microaccelerometer with Sub-fF Offset Calibration
  • Capacitive Readout Circuit for Tri-axes Microaccelerometer with Sub-fF Offset Calibration
저자명
Ouh. Hyun Kyu,Choi. Jungryoul,Lee. Jungwoo,Han. Sangyun,Kim. Sungwook,Seo. Jindeok,Lim. Kyomuk,Seok. Changho,Lim. Seunghyun,Kim.
간행물명
Journal of semiconductor technology and science
권/호정보
2014년|14권 1호|pp.83-91 (9 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents a capacitive readout circuit for tri-axes microaccelerometer with sub-fF offset calibration capability. A charge sensitive amplifier (CSA) with correlated double sampling (CDS) and digital to equivalent capacitance converter (DECC) is proposed. The DECC is implemented using 10-bit DAC, charge transfer switches, and a charge-storing capacitor. The DECC circuit can realize the equivalent capacitance of sub-fF range with a smaller area and higher accuracy than previous offset cancelling circuit using series-connected capacitor arrays. The readout circuit and MEMS sensing element are integrated in a single package. The supply voltage and the current consumption of analog blocks are 3.3 V and $230{mu}A$, respectively. The sensitivities of tri-axes are measured to be 3.87 mg/LSB, 3.87 mg/LSB and 3.90 mg/LSB, respectively. The offset calibration which is controlled by 10-bit DECC has a resolution of 12.4 LSB per step with high linearity. The noise levels of tri-axes are $349{mu}g$/${sqrt}$Hz, $341{mu}g$/${sqrt}$Hz and $411{mu}g$/${sqrt}$Hz, respectively.