During irradiation of lesions in cancer treatment with high energy electrons, normal tissue and critical organs are protected by the shielding material. Scattered radiation that generated the shielding materials affect the depth dose and atomic number. Therefore, we want to examine secondary particles and the scattered photons through calculation and its associated analysis, and compare the measurement for the aluminum, copper, and lead shielding substance of which thickness has 95% charge reduction. Dose change rate which effected scattering radiation was found to be +0.88% for material thickness, +0.43% for atomic number, and +19.70%, +15.20%, +12.40% for measurement, +25.00%, +15.10%, +13.70% for calculation on the aluminum, copper, and lead materials of which thickness has 95% charge reduction, respectively, As a result, we found that scattering rate was dependent on thickness than atomic number. In the dose increasing rate, scattered electrons are more important than scattered photon. For the above mentioned reasons, I think that high atomic number materials should be applied to reduce scattered radiation that generated with thickness effect.