- 중성자 조사에 따른 SiC Schottky Diode의 전기적 특성 변화
- ㆍ 저자명
- 김성수,강민석,조만순,구상모,Kim. Sung-Su,Kang. Min-Seok,Cho. Man-Soon,Koo. Sang-Mo
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2014년|27권 4호|pp.199-202 (4 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The effect of neutron irradiation on the properties of SiC Schottky Diode has been investigated. SiC Schottky diodes were irradiated under neutron fluences and compared to the reference samples to study the radiation-induced changes in device properties. The condition of neutron irradiation was $3.1{ imes}10^{10}$ $n/cm^2$. The current density after irradiation decreased from 12.7 to 0.75 $A/cm^2$. Also, a slight positive shift (${Delta}V_{th}$= 0.15 V) in threshold voltage from 0.53 to 0.68 V and a positive change (${Delta}{Phi}_B$= 0.16 eV) of barrier height from 0.89 to 1.05 eV have been observed by the neutron irradiation, which is attributed to charge damage in the interface between the metal and the SiC layer.