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MOS-FET구조의 MWCNT 가스센서에서 Vgs의 변화에 따른 NOx 가스 검출 특성
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  • MOS-FET구조의 MWCNT 가스센서에서 Vgs의 변화에 따른 NOx 가스 검출 특성
저자명
김현수,박용서,장경욱,Kim. Hyun-Soo,Park. Yong-Seo,Jang. Kyung-Uk
간행물명
전기전자재료학회논문지
권/호정보
2014년|27권 4호|pp.257-261 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Carbon nanotubes (CNT) has the excellent physical characteristics in the sensor, medicine, manufacturing and energy fields, and it has been studied in those fields for the several years. We fabricated the NOx gas sensors of MOS-FET type using the MWCNT. The fabricated sensor was used to detect the NOx gas for the variation of $V_{gs}$ (gate-source voltage) with the ambient temperature. The gas sensor absorbed the NOx gas molecules showed the decrease of resistance, and the sensitivity of sensor was reduced by the NOx gas molecules accumulated on the MWCNT surface. Furthermore, when the voltage ($V_{gs}$) was applied to the gas sensor, the term of the decrease in resistance was increased. On the other hand, the sensor sensitivity for the injection of NOx gas was the highest value at the ambient temperature of $40^{circ}C$. We also obtained the adsorption energy ($40^{circ}C$) using the Arrhenius plots by the reduction of resistance due to the $V_{gs}$ voltage variations. As a result, we obtained that the adsorption energy also was increased with the increasement of the applied $V_{gs}$ voltages.