- Role of HCl in Atomic Layer Deposition of TiO2 Thin Films from Titanium Tetrachloride and Water
- Role of HCl in Atomic Layer Deposition of TiO2 Thin Films from Titanium Tetrachloride and Water
- ㆍ 저자명
- Leem. Jina,Park. Inhye,Li. Yinshi,Zhou. Wenhao,Jin. Zhenyu,Shin. Seokhee,Min. Yo-Sep
- ㆍ 간행물명
- Bulletin of the Korean Chemical Society
- ㆍ 권/호정보
- 2014년|35권 4호|pp.1195-1201 (7 pages)
- ㆍ 발행정보
- 대한화학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
