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Design, Modeling, Control and Experiment for a 2-DOF Compliant Micro-Motion Stage
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  • Design, Modeling, Control and Experiment for a 2-DOF Compliant Micro-Motion Stage
  • Design, Modeling, Control and Experiment for a 2-DOF Compliant Micro-Motion Stage
저자명
Li. Yangmin,Xiao. Shunli,Xi. Longquan,Wu. Zhigang
간행물명
International journal of precision engineering and manufacturing
권/호정보
2014년|15권 4호|pp.735-744 (10 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new XY micro-motion stage is proposed with the double four-bar prismatic joints to transfer linear motions and mechanical displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. The simulation is made by using finite element analysis ANSYS software. The output cross-talk is about 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property. The mechanical prototype is fabricated, the experimental results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 5.06 and the working range is $156{mu}m{ imes}156{mu}m$. To tackle for the serious hysteresis nonlinear problems of the stage, model reference adaptive PID controller is designed, the final resolution can reach ${pm}0.2{mu}m$.