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Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
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  • Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
  • Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
저자명
Park. Sang-Joon,Jeong. Yeon-Uk,Park. Soyeun,Lee. Yong Joong
간행물명
Applied science and convergence technology
권/호정보
2014년|23권 2호|pp.97-102 (6 pages)
발행정보
한국진공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $5{ imes}10^{-3}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.