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Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet
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  • Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet
  • Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet
저자명
Yang. Wonkyun,Joo. Junghoon
간행물명
Applied science and convergence technology
권/호정보
2014년|23권 3호|pp.139-144 (6 pages)
발행정보
한국진공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

GaN deposition equipment and processes for the fabrication of white LEDs (Light Emitting Diode) using MOCVD (Metal Organic Chemical Vapor Deposition) were numerically modeled to analyze the effects of a reactive gas introduction strategy. The source gases, TMGa and $NH_3$, were injected from a shower head at the top of the chamber; the carrier gases, $H_2$ or $N_2$, were introduced using two types of injection structures: vertical and horizontal. Wafers sat on the holder at a radial distance between 100 mm and 150 mm. The non-uniformity of the deposition rates for vertical and horizontal injection were 4.3% and 3.1%, respectively. In the case of using $H_2$ as a carrier gas instead of $N_2$, the uniform deposition zone was increased by 20%.