Purpose: To assess the surface profile of dentinal wall, dentin chips and smear layer during the canal shaping with rotary (ProTaper) and ProFile and reciprocating (WaveOne) nickel-titanium file. Materials and Methods: Sixty human extracted mandibular premolars and incisors with single canals were randomly selected. Three experimental groups (n = 20) were instrumented with ProTaper (F2), ProFile (25/.06), WaveOne (25/.08) with irrigation of 2.5% NaOCl. The dentin chips were collected from flute of file during each canal preparation. After canal preparation, roots were grinded and each group was divided into two subgroups (n = 10) for surface profile and smear layer of dentinal wall of shaped root canal. Each specimen was observed under scanning electron microscope for evaluating size of dentin chips, root canal surface recessions and smear layer. Scores of Smear layer were statistically analyzed using Kruskal Wallis test and Mann Whitney test at P = 0.05 level. Results: The size of dentin chips from ProFile, ProTaper and WaveOne was up to $7{mu}m$, $6.5{mu}m$, and$4{mu}m$, respectively. In the surface profile, the width of surface irregularity was measured and Profile, ProTaper and WaveOne was up to $150{mu}m$, $70{mu}m$, and $80{mu}m$, respectively. Completely cleaned root canals were not found. In the middle and apical third of the canals, WaveOne group showed higher smear layer score than ProFile and ProTaper groups (P < 0.05). Conclusion: Within limits of this study, reciprocating motion WaveOne group was not significant difference of shaping ability with the full-sequence ProFile and ProTaper systems except canal clearness of middle and apical third of root canal. When using WaveOne to shaping root canal, thorough root canal irrigation is recommended.