This study attempted to investigate the optimum cooking conditions of chicken breast fillets employing the superheated steam (SHS). The effects of SHS cooking conditions on the physico-chemical and sensory properties of chicken breast fillets were studied. Chicken breast fillets for SHS cooking were treated in six different combinations of steam temperature ($330^{circ}C$ or $350^{circ}C$) and cooking time (6, 8 and 10 min). As a result, when the chicken breast fillets were cooked for 8min at $330^{circ}C$ and 6 min at $350^{circ}C$ steam, the internal temperature of the chicken breast fillets reached $75{sim}76^{circ}C$. At that cooking condition, the chicken breast fillets demonstrated lower cooking loss, higher moisture content, lower hardness and fracturability, and higher springiness; further, they had more acceptable sensory properties compared to the other SHS conditions and conventional electric oven cooking (control). These results suggest that the application of SHS technology to chicken breast fillet products can reduce the cooking time and cooking loss; moreover, it can produce highly preferred chicken products compared to conventional electric oven cooking.