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Error-immune Algorithm for Absolute Testing of Rotationally Asymmetric Surface Deviation
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  • Error-immune Algorithm for Absolute Testing of Rotationally Asymmetric Surface Deviation
  • Error-immune Algorithm for Absolute Testing of Rotationally Asymmetric Surface Deviation
저자명
Zhang. Yanwei,Su. Dongqi,Li. Le,Sui. Yongxin,Yang. Huaijiang
간행물명
Journal of the Optical Society of Korea
권/호정보
2014년|18권 4호|pp.335-340 (6 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Based on Zernike polynomial fitting, we propose an algorithm believed to be new for interferometric measurements of rotationally asymmetric surface deviation of optics. This method tests and calculates each angular surface by choosing specified rotation angles with lowest error. The entire figure can be obtained by superimposing these sub-surfaces. Simulation and experiment studies for verifying the proposed algorithm are presented. The results show that the accuracy of the proposed method is higher than single-rotation algorithm and almost comparable to the rotation-averaging algorithm with fewer rotation measurements. The new algorithm can achieve a balance between the efficiency and accuracy.