- 직류 마그네트론 스퍼터법에 의한 AlNO 복층박막의 제조와 특성
- ㆍ 저자명
- 김현후,오동현,백찬수,장건익,최동호,Kim. Hyun-Hoo,Oh. Dong-Hyun,Baek. Chan-Soo,Jang. Gun-Eik,Choi. Dong-Ho
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2014년|27권 9호|pp.589-593 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
AlNO multi-layer thin films on aluminum substrates were prepared by DC reactive magnetron sputtering method. $Al_2O_3$/AlNO(LMVF)/AlNO(HMVF)/Alstrate of 4 multi-layer has been prepared in an Ar and ($N_2+O_2$<) gas mixture, and $Al_2O_3$ of top layer is anti-reflection layer on double AlNO(LMVF)/AlNO(HMVF) layers and Al metal of infrared reflection layer. In this study, the roughness and surface properties of AlNO thin films were estimated by field emission scanning electron microscopy(FE-SEM). The grain size of AlNO thin films increased with increasing sputtering power. The composition of thin films has been systematically investigated using electron probe microanalysis(EPMA). The optical properties with wavelength spectrum were recorded by UV-Vis-NIR spectrophotometry at a range of 200~1,500 nm. The absorptance of AlNO films shows the increasing trend with swelling ($N_2+O_2$) gas mixture in HMVF and LMVF deposition. The excellent optical performance showed above 98% of absorptance in visible wavelength region.