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불순물 첨가에 따른 VO2 후막 급변온도센서의 온도-저항 특성
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  • 불순물 첨가에 따른 VO2 후막 급변온도센서의 온도-저항 특성
저자명
최정범,강종윤,윤석진,유광수,Choi. Jung Bum,Kang. Chong Yun,Yoon. Seok-Jin,Yoo. Kwang Soo
간행물명
Journal of sensor science and technology
권/호정보
2014년|23권 5호|pp.337-341 (5 pages)
발행정보
한국센서학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

For various additives doped-$VO_2$ critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of $VO_2$ sensor, vanadium pentoxide ($V_2O_5$) powders were used, and CaO, SrO, $Bi_2O_3$, $TiO_2$, and PbO dopants were used, respectively. The $V_2O_5$ powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on $Al_2O_3$ substrates and then $V_2O_5$-based thick films were heat-treated at $500^{circ}C$ for 2 hours in $N_2$ gas atmosphere for the reduction to $VO_2$. From X-ray diffraction analysis, $VO_2$ phases for pure $VO_2$, and CaO and SrO-doped $VO_2$ thick films were confirmed and their grain sizes were 0.57 to $0.59{mu}m$. The on/off resistance ratio of the $VO_2$ sensor in phase transition temperature range was $5.3{ imes}10^3$ and that of the 0.5 wt.% CaO-doped $VO_2$ sensor was $5.46{ imes}10^3$. The presented critical temperature sensors could be commercialized for fire-protection and control systems.