- Numerical Investigation of RF Pulsing Effect on Ion Energy Distributions at RF-biased Electrodes
- Numerical Investigation of RF Pulsing Effect on Ion Energy Distributions at RF-biased Electrodes
- ㆍ 저자명
- Kwon. Deuk-Chul,Song. Mi-Young,Yoon. Jung-Sik
- ㆍ 간행물명
- Applied science and convergence technology
- ㆍ 권/호정보
- 2014년|23권 5호|pp.265-272 (8 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
