- Pt 나노분말이 분산된 SiO2 박막의 구조 및 전기적 특성 제어
- ㆍ 저자명
- 이재호,신인주,이성우,김형철,최병준,Lee. Jae Ho,Shin. In Joo,Lee. Sung Woo,Kim. Hyeong Cheol,Choi. Byung Joon
- ㆍ 간행물명
- 한국분말야금학회지
- ㆍ 권/호정보
- 2014년|21권 5호|pp.355-359 (5 pages)
- ㆍ 발행정보
- 한국분말야금학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Pt nanopowder-dispersed $SiO_2$ (SOP) films were prepared by RF co-sputtering method using Pt and $SiO_2$ targets in Ar atmosphere. The growth rate and Pt content in the film were controlled by means of manipulating the RF power of Pt target while that of $SiO_2$ was fixed. The roughness of the film was increased with increasing the power of Pt target, which was mainly due to the increment of the size and planar density of Pt nanopowder. It was revealed that SOP film formed at 10, 15, 20 W of Pt power contained 2.3, 2.7, and 3.0 nm of spherical Pt nanopowder, respectively. Electrical conductivity of SOP films was exponentially increased with increasing Pt power as one can expect. Interestingly, conductivity of SOP films from Hall effect measurement was greater than that from DC I-V measurement, which was explained by the significant increase of electron density.