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Schottky Barrier Tunnel Field-Effect Transistor using Spacer Technique
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  • Schottky Barrier Tunnel Field-Effect Transistor using Spacer Technique
  • Schottky Barrier Tunnel Field-Effect Transistor using Spacer Technique
저자명
Kim. Hyun Woo,Kim. Jong Pil,Kim. Sang Wan,Sun. Min-Chul,Kim. Garam,Kim. Jang Hyun,Park. Euyhwan,Kim. Hyungjin,Park. Byung-Gook
간행물명
Journal of semiconductor technology and science
권/호정보
2014년|14권 5호|pp.572-578 (7 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In order to overcome small current drivability of a tunneling field-effect transistor (TFET), a TFET using Schottky barrier (SBTFET) is proposed. The proposed device has a metal source region unlike the conventional TFET. In addition, dopant segregation technology between the source and channel region is applied to reduce tunneling resistance. For TFET fabrication, spacer technique is adopted to enable self-aligned process because the SBTFET consists of source and drain with different types. Also the control device which has a doped source region is made to compare the electrical characteristics with those of the SBTFET. From the measured results, the SBTFET shows better on/off switching property than the control device. The observed drive current is larger than those of the previously reported TFET. Also, short-channel effects (SCEs) are investigated through the comparison of electrical characteristics between the long- and short-channel SBTFET.