- An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method
- An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method
- ㆍ 저자명
- Kang. Jeon-Hong,Ying. Gao,Cheng. Yuh-Chuan,Kim. Chang-Soo,Lee. Sang-Hwa,Yu. Kwang-Min
- ㆍ 간행물명
- Journal of electrical engineering & technology
- ㆍ 권/호정보
- 2015년|10권 1호|pp.325-330 (6 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
