- Parallelogram형 Flexure Hinge 에 의한 Motion Stage 의 최적 설계
- ㆍ 저자명
- 최주용,엄상인,김정현,Choi. Ju Yong,Eom. Sang In,Kim. Jung Hyun
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2015년|32권 1호|pp.107-111 (5 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper proposes an optimal design for a precision motion stage employing a parallelogram flexure hinge. The voltage applied to the piezo element produces motion that is amplified through a 3-stage amplification structure. Especially, instead of the generally used conic section flexure hinge a parallelogram shaped flexure hinge is used that improves the flexibility of the lever. An Finite Element Analysis is performed on each motion stage lever where optimal design was achieved using Response Surface Methodology(RSM).