The SiC coatings were prepared by spin coating of polycarbosilane on the silicon wafer which acts as precermaic precursor of SiC and pyrolysis at 1200℃. Thickness of SiC coating was increased in proportional to the polycarbosilane solution concentration and reached to 0.95μm at the concentration of 230g/l. There were clean and no cracks were observed on the surface and the adhesion also seemed to be good. The coating were composed of SiC nanocrystals and some α-crystobalite (SiO2) come from curing process. During pyrolysis after coating and curing of polycarbosilane coating on the silicon wafer, polycarbosilane was decomposed away its organic pandents and remained Si-C backbone which act as SiC crystal formation. Keyword: silicon carbide, coating, film, preceramic polymer, spin coating, energy efficiency