Significant number of particles can be generated from light ablation of contamination of cobalt, cesium, europium and cerium on stainless steel surface. The number concentration and size distribution of the particles were investigated on the variation of laser fluence for 532-nm laser ablation. The geometric mean diameter that appears to be independent of the applied laser fluence, were about 70-80nm for all contamination tested from SMPS data. The collection of removed particles in the HEPA filter was studied. Most of the removed particles was found to be collected in the HEPA filler and more efficient filter of the HEPA type would lead to >99.9% trapping of removed contaminants.