Graphene was grown on molybdenum (Mo) foil by a chemical vapor deposition method at
different growth temperatures (1000°C, 1100°C, and 1200°C). The properties of graphene
were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy, and Raman
spectroscopy. The results showed that the quality of the deposited graphene layer was
affected by the growth temperature. XRD results showed the presence of a carbide phase on
the Mo surface; the presence of carbide was more intense at 1200°C. Additionally, a higher
I2D/IG ratio (0.418) was observed at 1200°C, which implies that there are fewer graphene layers
at this temperature. The lowest ID/IG ratio (0.908) for the graphene layers was obtained
at 1200°C, suggesting that graphene had fewer defects at this temperature. The size of the
graphene domains was also calculated. We found that by increasing the growth temperature,
the graphene domain size also increased.