ISFETS for physiological applications have been developed using the techniques for integrated circuit fabrication. The silicon nitride layer was used as a H+ sensing membrane. However, K+, Na+ and Ca++ sensing ISFETS were fabricated by forming tach specification sensing membranes over the silicon nitride gate insulator. The sensitivities of the fabricated devices were very good. The typical values of measured sentivities were iEmV/pH, 42mv1, pH,5 gmV/pNa and 28mv1p0a. However, the selectivity and stability should be somewhat improved for practical physiological uses with good reliability. The response times were, less than one second, short enough for the practical uses in physiological applications.