- 화학증착법에 의한 $SnO_2$ Film의 전기적 및 광학적 성질
- ㆍ 저자명
- 김광호,김태옥,천성순
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1986년|23권 5호|pp.81-85 (5 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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$SnO_2$ thin films have been prepared by chemical vapor deposition technique. Electrical and optical properties of the films have been investigated. It is found that the electrical condictivity and optical transparency of the films are most affected by deposition temperature and more affected by $SnCl_4$ partial pressure than by $O_2$ partial pressure. Experimental results show that the conductivity increases with high optical transparency as deposition temperature increases up to 50$0^{circ}C$ but the conductivity decreases with the loss of transparency as deposition temperature increases above $600^{circ}C$