Ultra-fine $eta$-SiC powders were fabricated by self-propagating high temperature synthesis process (SHS) using chemical furnace. The dependences of the C powders with different surface areas, the molar ratios of C/Si, the weight ratios of chemical fuel content, and pellet diameter-size on synthesis were investigated. Compositional and structural characterization of these powders was carried out by scanning electron micrograph and X-ray diffraction. The $eta$-SiC powders which had C/Si mole ratio=1.05, 3 times chemical fuel contents, and pellet diameter=20 mm were optimum for synthesis efficiency. By optimizing process-variables, it is possible to fabricate $eta$-SiC powders which have little secondary phases ($alpha$-SiC).