- Arc Vapor Ion Deposition 법으로 제조된 TiN 피막의 내마모성에 관한 연구
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- 신현식,한전건,장현구,고광진
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- 한국표면공학회지
- ㆍ 권/호정보
- 1994년|27권 1호|pp.36-44 (9 pages)
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- 한국표면공학회
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The TiN films were deposited on the stainless substrates using arc vapor ion deposition process to in-vestigated the wear resistance. Pin-on-disc tests were performed to measure the volume wear loss of TiN films. The substrate bias voltages and nitrogen flow rates were selected as the deposition parameters of TiN films. It was found that the wear resistance of TiN films was enhanced with increasing bias voltages(0~-300 V) and nitrogen flow rates(220~380 SCCM). The volume wear loss TiN films were about 9.5~2.1$ imes$$10^{-3}mm^3$ and 3.5~2.2$ imes$$10^{-3}mm^3$ with bias voltages and nitrogen flow rates, respectively.