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$Hg_{1-x}Cd_{x}$Te photovoltaic 대형 적외선 감지 소자의 제작
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  • $Hg_{1-x}Cd_{x}$Te photovoltaic 대형 적외선 감지 소자의 제작
저자명
정한,김관,이희철,김재묵
간행물명
電子工學會論文誌. Jounnal of the Korea institute of telematics and electronics. A. A
권/호정보
1994년|2호|pp.88-93 (6 pages)
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대한전자공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We fabricated a large-scale photovoltaic device for detecting-3-5$mu$m IR, by forming of n$^{+}$-p junction in the $Hg_{1-x}Cd_{x}$Te (MCT) layer which was grown by LPE on CdTe substrate. The composition x of the MCT epitaxial layer was 0.295 and the hole concentration was 1.3${ imes}10^{13}/cm^{4}$. The n$^{+}$-p junction was formed by B+ implantation at 100 keV with a does 3${ imes}10^{11}/cm^{2}. The n$^{+}$ region has a circular shape with 2.68mm diameter. The vacuum-evaporated ZnS with resistivity of 2${ imes}10^{4}{Omega}$cm is used as an insulating layer over the epitaxial layer. ZnS plays the role of the anti-reflection coating transmitting more than 90% of 3~5$mu$m IR. For ohmic contacts, gole was used for p-MCT and indium was used for n$^{+}$-MCT. The fabrication took 5 photolithographic masks and all the processing temperatures of the MCT wafer were below 90$^{circ}C$. The R,A of the fabricated devices was 7500${Omega}cm^{2}$. The carrier lifetime of the devices was estimated 2.5ns. The junction was linearly-graded and the concentration slope was measured to be 1.7${ imes}10^{17}/{mu}m$. the normalized detectivity in 3~5$mu$m IR was 1${ imes}10^{11}cmHz^{12}$/W, which is sufficient for real application.