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INTERFACIAL REACTION AND ELELECTRICAL PROPERTY OF Ge/Ni/ZnSe FOR BLUE LASER DIODE
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  • INTERFACIAL REACTION AND ELELECTRICAL PROPERTY OF Ge/Ni/ZnSe FOR BLUE LASER DIODE
  • INTERFACIAL REACTION AND ELELECTRICAL PROPERTY OF Ge/Ni/ZnSe FOR BLUE LASER DIODE
저자명
Kim. D.W.,Park. H.S.,Kwak. J.S.,Lee. S.M.,Baik. H.K.
간행물명
Fabrication and Characterization of Advanced Materials
권/호정보
1995년|2권 |pp.875-880 (6 pages)
발행정보
한국재료학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

As a fundamental study to develop ohmic contact material and process, Ge/Ni/ZnSe interfacial reaction and electrical property would be investigated. After annelaing at $170^{circ}C$ for 10min, NiGe was the first phase in the Ge/Ni interface and fine $Ni_3Se_2$ phase was observed at the Ni/ZnSe interface. As Ni reacted with Ge, Ni was deficient in Ge/Ni interface and no more interfacial reaction could occurred. In order to evaluate Schottky barrier height of Ge/Ni/p-ZnSe diode, C-V measurements were carried out for Ge/Ni diodes before and after annealing at temperature ranged form $130^{circ}C$ to $410^{circ}C$ for 10 minute under $N_2$ atmosphere. The Schottky barrier height was 1.3eV at as-deposited state and it decreased rapidly to 0.44eV after annealing at $170^{circ}C$. Considering interfacial reaction, we can conculde that the reaction phase at Ni/ZnSe interface lowered Schottky barrier height.