To ceramic mm, $SiO_2$ and $Al_2O_3$, coated on pure Fe and stainless steel(SUS41O) by RF magnetron sputtering, the adherence between mm and substarte was studied. The adherence index (${chi}$) was determined by the measure of micro hardness test. Also, the corrosion resistance on oxide coatings was studied using electrochemical measurement. The main results obtained are as the following: 1) In the micro-hardness test, with $1{mu}m$ thickness mm, it has only one the value of ${chi}$. Above $2{mu}$thickness fIlm, however, get another value of ${chi}$as the cracks in fIlm. 2) The oxide fIlm adhere well on the mild materials such as pure steel than high intensity materials like stainless. 3) Alumina($Al_2O_3$) coated materials have better corrosion resistance than silica($SiO_2$)coated materialsterials