- 레이저 어블레이션에 의해 증착된 비정질 다이아몬드 박막의 결합및 물리적 특성
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- 박환태,홍영규,김재기,김진승,박찬
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 1996년|5권 1호|pp.1-5 (5 pages)
- ㆍ 발행정보
- 한국진공학회
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- 정기간행물| PDF텍스트
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- 기타
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Noncrystalline films of diamond-like carbon (DLC) have been prepared by laser ablation technique at room temperature. A Q-switched Nd-YAG laser beam with wavelength of 1064 nm and pulse duration of 10 ns was focused onto a graphite target with power densities of about $10^9 W/ extrm{cm}^2$. The physical properties of the resulting films were analyzed with density, hardness, and resistivity measurements. The surface and bonding structure were investigated by atomic force microscopy (AFM), Raman spectroscopy, electron energy loss spectroscopy (EELS).