- Spin-coating 법으로 Nb-doped SrTiO$_3$(100) 기판위에 제조한 Pb(Zr, Ti)O$_3$ 박막의 에피탁시와 표면 미세구조에 미치는 열처리온도의 영향
- ㆍ 저자명
- 이경무,황규석,김병훈
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1998년|35권 8호|pp.791-794 (4 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The epitaxial Pb(Zr, Ti)O3 (Pb:Zr:Ti=1:0.52:0.48) thin films have been grown on Nb-doped SrTiO3(100) substrates by spin-coating technigue using metal naphthenates as starting m0) aterials,. Highly oriented films with homogeneous and smooth surfaces were obtained by heat-treatment at 75$0^{circ}C$ and X-ray diffraction pole-figure analysis ($eta$ scanning) showing that these films had an epitaxial relationship with substrates used. With increasing the heat-treatment temperature up to 80$0^{circ}C$ the films exhibited distinct polycrystalline grains while crystallinity and epitaxy in the films tended to decrease after annealing at 85$0^{circ}C$