- 이온빔 보조 증착법을 이용항 제작된 SnO$_2$에 초박막 Pd가 첨가된 박막형 가스센서의 메탄가스 감지특성
- ㆍ 저자명
- 조정,조준식,윤기현,김현주,최원국,정형진,고석근
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1998년|35권 8호|pp.795-800 (6 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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SnO2 thin films were fabricated by reactive ion-assisted deposition(R-IAD) and metallic Pd layer with 30 $AA$ in thickness as a catalyst was sub-surface diffused on SnO2 thin film in two different ways by ion beam sputtering the first it was in-situ deposited on pre-heated substrate at 30$0^{circ}C$ with cooling down for 1 hr and the second it was annealed at 30$0^{circ}C$ in the air atmosphere for 1 hr. The sensor with surface adsorbed Pb layer in vacuum showed 4-5 times higher sensitivity to CH4 than that of the sensor annealed in the air From the XPS analyses