- 스핀스레이법 의한 $Fe{3-X}-Ni_XO_4$ 페라이트 박막의 제작과 그 특성
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- 1998년|11권 8호|pp.652-657 (6 pages)
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We have performed spin-spray ferrite plating of $Fe{_3}{-X}-Ni_XO_4$(X=0.17~0.26) films in the temperature region $T=80~95[^{circ}C]$. A reaction solution and an oxidizing solution were supplied to a reaction chamber by supply pump. The solubility limit of Ni increases as the substrate temperature increase, from X=0.17 at $80[^{circ}C]$ to X=0.26 at $95[^{circ}C]$. All the films are polycrystalline with no preferential orientation, and the magnetization exhibits no definite anisotropy. Grain size in the films increases as X increases, reaching $0.87[mu{m}]$ at X=0.26.