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Fabrication and Electric Properties of $ extrm{LiNbO}_3$ Thin Film by an Rf-magnetron Sputtering Technique Li-Nb-K-O Ceramic Target
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  • Fabrication and Electric Properties of $ extrm{LiNbO}_3$ Thin Film by an Rf-magnetron Sputtering Technique Li-Nb-K-O Ceramic Target
  • Fabrication and Electric Properties of $ extrm{LiNbO}_3$ Thin Film by an Rf-magnetron Sputtering Technique Li-Nb-K-O Ceramic Target
저자명
박성근,백민수,배승춘,권성열,김광태,김기완,Park. Seong-Geun,Baek. Min-Su,Bae. Seung-Chun,Gwon. Seong-Yeol,Kim. Gwang-Tae,Kim. Gi-Wan
간행물명
한국재료학회지
권/호정보
1999년|9권 2호|pp.163-167 (5 pages)
발행정보
한국재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

LiNbO$_3$films were prepared by an rf-magnetron sputtering technique using sintered target containing potassium. The potassium was included to help to fabricate stoichiometric LiNbO$_3$film. Structural and electrical properties of thin films was investigated as a function of deposition condition. Optimum sputtering conditions were rf power of 100W, working pressure of 1m Torr and substrate temperature of 58$0^{circ}C$. The thin film was grown to (012) preferred orientation. The dielectric constant of the thin film LiNbo$_3$ fabricated under optimum condition was 55 at 1MHz. Average grain size is about 200$AA$ and roughness of the film is small enough to apply to optic devices.