Polyetherimide와 실리콘 사이의 RIE 처리 및 알루미늄 킬레이트 계열의 adhesion promoter 처리에 따른 접착력과 고온고습환경에서의 신뢰성 변화를 연구하였다. 실험 방법으로는 180$^{circ}$ 필 테스트 및 <85$^{circ}C$ 85%> 테스트, SEM, AFM, 증류수 접촉각 실험이 수행되었다. $^O_2$ RIE 실험 결과 초기 접착력은 RIE 처리시간에 따라 약간의 변화를 가져왔으나 고온고습 환경에서의 저항성은 급격히 떨어지는 것이 관찰되었고 이것은 표면 거칠기의 영향이 아닌 표면의 친수성 정도에 따른 것으로 나타났다. Al-chelate adhesion promoter의 경우 초기 접착력에는 변화가 없으나 고온 고습환경에서의 저항성이 크게 증가하였는데 이것은 표면이 소수성으로 변한 데 따른 것으로 나타났다.
The adhesion strength and high temperature/high humidity reliability of polyetherimide (PEI) adhesive on silicon wafer after being treated by each reactive ion etching (RIE) Aluminum (Al)-chelate adhesion promoter were investigated. 180$^{circ}$ peel test and <85$^{circ}C$ 85%> humidity test were performed for the initial adhesion strength and high temperature/high humidity reliability, respectively. For investigating surface effect scanning electron microscope (SEM), atomic force microscope (AFM), deionized (DI)-water contact angle studies were carried out. To investigate RIE effect, PEI was treated with $^O_2$ RIE, and then laminated. The initial peel strength increased slightly from 1.6 kg/cm for the first 2 minutes, and then decreased. High temp/high humid resistance decreased rapidly by RIE etching. RIE treatment on PEI affected on both of roughness and hydrophilicity increase. Aluminum-chelate adhesion promoter was coated by spinning on silicon wafer. The initial peel strength showed no effect of adhesion promoter treatment, but high temp/high humidity resistance increased remarkably. Al-chelate adhesion promoter did not affect the roughness but increased hydrophilicity.
