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Preparation of the Polymers Containing Phenylamide and Dimethylaminoethyl Groups and their Properties as a Nagative Photoresist
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  • Preparation of the Polymers Containing Phenylamide and Dimethylaminoethyl Groups and their Properties as a Nagative Photoresist
  • Preparation of the Polymers Containing Phenylamide and Dimethylaminoethyl Groups and their Properties as a Nagative Photoresist
저자명
Chae. Kyu-Ho,Kang. Jin-Koo,Kim. Su-Kyung,Chough. Sung-Hyo
간행물명
Journal of photoscience: an international journal officail organ of the Korean Society of Photoscience
권/호정보
2000년|7권 2호|pp.47-52 (6 pages)
발행정보
한국광과학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The copolymmers of N, N-dimethylaminoethyl methacrylate(DAEM) and N-arylmethacrylamide (AMA) were prepared, and their photochemical properties as a negative photoresist were studied by the measurements of insoluble fraction, and by UV and IR absorption spectral changes. These copolymers are soluble in DMF, actone, methanol, of acidic buffer solutions. Solubility of these copolymer films in the vuffer solutions increased with the amount of DAEM units in the copolymer and decreased with the pH value. The insoluble fraction of the copolymer films in the buffer solution of pH 4 of in methanol increased with irradiation time and the amount of AMA units in the copolymer. UV and IR spectral changes indicated that not only photo-crosslinking but also the photo-Fries rearrangement took place upon irradiation with a 254nm UV light.