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서지반출
Antifuse Circuits and Their Applicatoins to Post-Package of DRAMs
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  • Antifuse Circuits and Their Applicatoins to Post-Package of DRAMs
  • Antifuse Circuits and Their Applicatoins to Post-Package of DRAMs
저자명
Wee. Jae-Kyung,Kook. Jeong-Hoon,Kim. Se-Jun,Hong. Sang-Hoon,Ahn. Jin-Hong
간행물명
Journal of semiconductor technology and science
권/호정보
2001년|1권 4호|pp.216-231 (16 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Several methods for improving device yields and characteristics have been studied by IC manufacturers, as the options for programming components become diversified through the introduction of novel processes. Especially, the sequential repair steps on wafer level and package level are essentially required in DRAMs to improve the yield. Several repair methods for DRAMs are reviewed in this paper. They include the optical methods (laser-fuse, laser-antifuse) and the electrical methods (electrical-fuse, ONO-antifuse). Theses methods can also be categorized into the wafer-level(on wafer) and the package-level(post-package) repair methods. Although the wafer-level laser-fuse repair method is the most widely used up to now, the package-level antifuse repair method is becoming an essential auxiliary technique for its advantage in terms of cost and design efficiency. The advantages of the package-level antifuse method are discussed in this paper with the measured data of manufactured devices. With devices based on several processes, it was verified that the antifuse repair method can improve the net yield by more than 2%~3%. Finally, as an illustration of the usefulness of the package-level antifuse repair method, the repair method was applied to the replica delay circuit of DLL to get the decrease of clock skew from 55ps to 9ps.