- 질환탄소 박막 증착 시 고전압 방전 플라즈마에 가한 자장의 영향
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- 전기전자재료학회논문지
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- 2002년|15권 2호|pp.184-189 (6 pages)
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- 한국전기전자재료학회
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- 정기간행물| PDF텍스트
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- 기타
Carbon nitride films were grown on Si (100) substrate by a laser-electric discharge method with/without a magnetic field assistance. The magnetic field leads to vapor plume plasma expending upon the ambient arc discharge plasma area. Influence of the magnetic field has resulted in increased of a crystallite size int he films due to bombardment (heating) of Si substrates by energetic carbon and nitrogen species generated during cyclotron motion of electrons in the discharge zone. The surface morphology of the films with a deposition time of 2 hours was studied using a scanning electron microscopy (SEM). In order to determine the structural crystalline parameters, X-ray diffraction (XRD) was used to analysis the grown films.