This research aimed at from the establishment of theory on micro electrochemical machining mechanism to the implementation of a practical fabrication system of micro parts. In detail, the mechanism of micro-ECM was investigated with potentiodynamic method and the optimal condition for micro-ECM was selected by voltage-current-time curve with potentiostatic method. From the experimental result, the micro part which has extremely fine surface could be fabricated by use of micro-ECM with point electrode method.