During warm and hot forging process of steels or aluminum alloys, dies are subject to early fracture, severe wear by thermo-mechanical stress. Especially, during the die-casting of aluminum alloys, the service life of dies is incredibly lowered. In this study we investigated the characteristics of TiBN films produced by PECVD. TiBN films showed very high hardness, excellent wear resistance, which could enhance the service life of die parts such as forging punch, die casting core pin successfully.