- MOD법을 이용 제조한 Bi3.25Nd0.75Ti3O12 강유전 박막의 열처리 온도에 따른 전기적 특성
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- 김기범,장건익
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2003년|16권 7호|pp.599-603 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ferroelectric B $i_4$$_{-x}$N $d_{x}$ $Ti_3$ $O_{12}$ (BNdT) thin films with the composition(x=0.75) were prepared on Pt/Ti/ $SiO_2$(100) substrate by metal-organic deposition. The films were annealed by various temperatures from 550 to $650^{circ}C$ and then the electrical and structural characteristics of BNdT films were investigated for the application of FRAM. Electrical properties such as dielectric constant, 2Pr and capacitance were quite dependent on the thermal heat treatment. The measured 2Pr value on the BNdT capacitor annealed at $650^{circ}C$ was 56$mu$C/$ extrm{cm}^2$ at an applied voltage of 5V. In fatigue characteristics value remained constant up to 8$ imes$10$^{10}$ read/write switching cycles at a frequency of 1Mhz regardless of annealing temperatures.s.s.