For evaluation of durability of low vacuum pumps, it is required to examine the performance and degradation of low vacuum pumps. Pump degradation may result from abnormalities associated with the performance in many areas of pump operation. The diagnostics method can be used to monitor the pump performance in the semi-conductor process line. Based on the mechanical defect of the pump, the dynamic response and reliability of the system for performance test, and the dynamic characteristics of the pump were experimentally assessed. The theoretical work rate for the compression process in the pump was calculated, and then the efficiency of the pump associated with the power consumption was evaluated. This analysis will be useful in detecting pump degradation with increasing the power consumption. To determine the predominant factors of pump degradation, it is important to evaluate the entire pumping system. We studied vibration, dynamic pressure, pumping speed, and power consumption of low vacuum pumps. Our results can be utilized for the future research on the evaluating technology of durability of low vacuum pumps.